| 摘要 |
PURPOSE:To contrive rapid and high-accuracy focusing and prevention of damage inflicted by the contact of acoustic lens and specimen, by automatic focusing basing upon focus informations obtainable from amplitudes of interference wave of each reflection wave on the border surface of acoustic lens and liquid and on the surface of the specimen. CONSTITUTION:On a ultrasonic wave transducer member 12 of a supersonic wave microscope composed of acoustic lens 13, piezoelectric transducer 3, a sub- piezoelectric transducer 15 for focusing is provided. As a preparing means 16, comparison is made with a different timing on a voltage amplitudes obtained by electric conversion with the transducer on interference waves of ultrasonic wave reflected on the surface of the specimen 8 subsequent to generation from the transducer 15 and ultrasonic wave reflected on the border surface of liquid between the specimens 8 and the lens 13. As a focusing means 32, a focusing operation is conducted on the transducer member 13 based upon an output of a means 26. |
