AGENT FOR PURIFYING RAW MATERIAL GAS OF SEMICONDUCTOR, ITS PREPARATION AND ITS USE,申请号JP19830120646-传众专利搜索

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发明名称	AGENT FOR PURIFYING RAW MATERIAL GAS OF SEMICONDUCTOR, ITS PREPARATION AND ITS USE
摘要
申请公布号	JPS6016802(A)	申请公布日期	1985.01.28
申请号	JP19830120646	申请日期	1983.07.01
申请人	OLYMPUS KOGAKU KOGYO KK;DAIDOU SANSO KK	发明人	YUSA ATSUSHI
分类号	B01J20/02;C01B6/34;C01B25/06;C01B33/04;H01L21/205;H01L31/04;(IPC1-7):C01B6/34	主分类号	B01J20/02
代理机构		代理人
主权项
地址

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