POLYMERS OF CHLOROFLUOROALKYL)-2-PROPENOATES AND METHOD OF THEIR PREPARATION

摘要

Polymers of (chlorofluoroalkyl)-2-propenoates are formed of homopolymers with copolymers of (chlorofluoroalkyl)-2-propenoates of general formula CH2 = CX - COO - CH2 - R1 , where X is hydrogen or methyl, R1 is chlorodifluoromethyl (CF2Cl), chlorotetrafluoroethyl (C2ClF4), 1,2-dichlorotrifluoroethyl (CF2ClCFCl), trichlorodifluoroethyl (C2Cl3F2), 1,1-dichlorotrifluoroethyl (CF3CCl2), chlorotrifluoroethyl (C2HClF3), dichlorodifluoroethyl (C2HCl2F2), or their copolymers with alkyl-2-propenoates of general formula CH2 = CX - COOR2 , where X has the abovementioned meaning and R2 is aliphatic, cycloaliphatic or aromatic aliphatic alkyl containing 1 to 8 carbon atoms. They can be used as sensitive positive electronic resists.