| 摘要 |
PURPOSE:To manufacture the titled base material free from OH groups by burning a mixture of a specified Si compound with dopants and a compound contg. fluorine in a quartz pipe, depositing the resulting silica contg. the dopants on the inner wall of the quartz pipe, and making the pipe solid. CONSTITUTION:An Si compound represented by formula I (where R is H, methyl, ethyl, propyl or vinyl, X is halogen, methoxy, ethoxy or propoxy, and n is 0-4), dopants represented by formulae GeX4, BX3, POCl3 and PH3, and a compound contg. fluorine represented by formula II (where Y is Cl or Br, 2a+2=b+c+d, a, c>=1, and b, d>=0) are introduced into a mixer 7 from ducts 1-5, mixed with gaseous O2 from a duct 6, and blown into a quartz pipe 8 from a feed nozzle 9 while rotating and moving the pipe 8. The pipe 8 is heated from the outside with an oxyhydrogen flame from a burner 10 to form silica contg. the dopants, and the silica is deposited on the inner wall of the pipe 8. The pipe 8 is then melted by heating and made solid. |
