| 摘要 |
PURPOSE:To make it possible to measure the exact position of displacement, without impairing a probe and a surface to be measured, by providing a function, by which the probe is leviated from the surface to be measured. CONSTITUTION:A pair of the secondary coils 8 and 9 is provided up and down positions so as to hold a primary coil 7. Of these coils, the coil 8 is freely connected to a power source 14, which is different from a power source that supplies AC to the coil 7. An iron core 5 is attracted to the side of the coil 8, a moving arm 2 is slightly moved, and a probe 3, which is fixed to the lower end surface of the arm 2, is lifted. Therefore, the probe 3 can be appropriately moved when a projection part is present on a surface to be measured 15. |
