| 摘要 |
PURPOSE:To enable to convey a negative plate without having manual help as well as to enable to prevent adhesion of dust when the negative plate is maintained by a method wherein a mask or a reticle is placed in a cassette. CONSTITUTION:A screw 13 is rotated by the revolution of a motor 15 through the intermediaries of gears 14a and 14b, and when a fork 11 has been entered into a carrier 9, the fork 11 is moved up to the position where it comes in contact with the part 4a of a box member 4 by rotating a motor 22 a little and by pushing up a substrate 18 through the intermediaries of gears 21a and 21b and a screw 20, and the engaging part of the fork 11 is engaged to the recessed part located on the box member 4. Then, a motor 15 is rotated, and when the fork 11 returns to the side of the motor 15 through the intermediaries of gears 14a and 14b and the screw 13, the fork 11 is carried out to outside of a carrier 9 together with the box member 4 and the reticle 6. At this time, as a cover member 1 is hooked to the stopper of the carrier 9 and a pawl member is frictionally engaged on the inner wall of the carrier 9, the box member 4 only is carried out by the fork 11. The carrying out of the box member 4 stops at the prescribed position by the action of a limit switch and the like. |
