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发明名称
METHOD FOR EVALUATING INSULATION LAYER
摘要
申请公布号
JPH09178800(A)
申请公布日期
1997.07.11
申请号
JP19950341685
申请日期
1995.12.27
申请人
SUMITOMO METAL IND LTD
发明人
YAMAMOTO KAZUHIRO
分类号
G01R31/26;G01R31/12;H01L21/66;(IPC1-7):G01R31/12
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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