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发明名称
摘要
申请公布号
JPS59192150(U)
申请公布日期
1984.12.20
申请号
JP19830086906U
申请日期
1983.06.07
申请人
发明人
分类号
H01L21/673;G03F1/60;H01L21/027;H01L21/30;H01L21/68
主分类号
H01L21/673
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