| 摘要 |
PURPOSE:To form a homogeneous film on each one of all substrates by making all electrodes for plasma discharge equivalent in terms of AC. CONSTITUTION:Vapor mixed gas of monosilane is admitted into a reaction container 12, and discharged through a vacuum pump 14. Electrodes A161-163, and electrodes B171-173 are led into the container 12. The electrodes A and B are in the same shape and all set at the same intervals. Wires from the electrodes A and B are connected to a matching box 19, which connects with an AC current 20 so that both electrodes A and B are opposite in phase in terms of AC and at the same potential in terms of DC. Thus, difference in film quantity due to the difference in electrode potential is eliminated to form homogeneous films on all substrates. |
