发明名称 BALL DIAMETER MEASURING APPARATUS IN WIRE BONDING
摘要 <p>PURPOSE:To make it possible to accurately judge the adequacy of a ball diameter in a moment, by directly measuring the ball diameter by irradiating a ball formed to the leading end of a wire with laser beam while detecting reflected beam by converting the same to electric output. CONSTITUTION:Beam 11 from laser 10 is incident to a lens holder 15 through an optical fiber 12, a beam distributor 13 and an optical fiber 14 and converted to parallel beam 17 by a lens 16 to irradiate the ball 3 at the leading end of a wire 2. Reflected beam 18 is inputted to a detector 20 through the lens 16, the optical fiber 14, the beam distributor 3 and an optical fiber 19 to be converted to electric output which is then inputted to a microcomputer 21. The ball diameter is calculated from the relation of the ball diameter and the output calculated from an experiment to be displayed to a television monitor 22 while the adequacy of the ball diameter is judged.</p>
申请公布号 JPS59225306(A) 申请公布日期 1984.12.18
申请号 JP19830100213 申请日期 1983.06.07
申请人 SHINKAWA:KK 发明人 IWASE TOSHIAKI
分类号 G01B11/08;(IPC1-7):G01B11/08 主分类号 G01B11/08
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