METHOD FOR REGENERATING ETCHING POWER OF ETCHING SOLUTION FOR COPPER OR COPPER ALLOY

摘要

PURPOSE:To restore and regenerate easily and surely etching power by blowing air contg. oxygen in a high concn. to an etching soln. in which cuprous ion is formed by etching thereby converting the same to cupric ion. CONSTITUTION:Ordinary air (a) is passed through a filter F1 and is fed to a nitrogen adsorber 23 after the air is energized by a compressor 22. Nitrogen is removed from the air in said device to create the air (a') of high oxygen concn. contg. >=40vol% oxygen which is then stored in a storage tank 24. The air is passed through a filter F2 and the concn. and flow rate thereof are measured by an oxygen densitometer 2 and a flowmeter 26 and is blown through a humidifier 27 and an air blowing pipe 20 into the etching soln. The cuprous ion formed in the etching soln. is thus regenerated to cupric ion.