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发明名称
摘要
申请公布号	DE2950212(C2)	申请公布日期	1984.12.13
申请号	DE19792950212	申请日期	1979.12.13
申请人	FUJITSU LTD., KAWASAKI, KANAGAWA, JP	发明人	YONEDA, YASUHIRO, YOKOHAMA, KANAGAWA, JP;KITAMURA, KENRO, FUJISAWA, KANAGAWA, JP;NAITO, JIRO, KANAGAWA, JP;KITAKOHJI, TOSHISUKE, MACHIDA, TOKIO/TOKYO, JP
分类号	G03F7/20;G03F7/038;H01L21/027;(IPC1-7):G03C1/68;C08F218/14;G03F7/10	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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