摘要 |
PURPOSE:To increase the permeation rate of an internal porous structure such as a hollow yarn by subjecting one surface of the internal porous structure, having a minute skin layer on both surfaces, to a plasma treatment under the atmosphere of a non-polymerizable gas, and transforming the surface into a microporous layer. CONSTITUTION:The outline of the treatment with glow discharge and a batch system is shown in the figure. Rods 8 and 8' for supporting hollow yarns are provided in a vacuun vessel 1, and a group of hollow yarns 2 is stretched and kept between both supporting rods. A non-polymerizable gas is introduced from a cock 3 to regulate the pressure in the vessel to about 10<-3>-10Torr. Plasma is generated by impressing an electric power having about 0.5-200W output to an oscillating coil 5 through a high-frequency oscillator 4. Since the vacuum vessel can be separated into two parts from an O-ring 6 and 6' part, the hollow yarn can be taken in and out from the opening part of the separated vessel. An outlet 7 is connected to the vacuum pump. |