| 摘要 |
PROBLEM TO BE SOLVED: To provide a method in which an air curtain-like inert gas is used to surround the periphery of a crucible, and an apparatus employing the method. SOLUTION: In a super fine particle manufacturing apparatus, a nozzle is provided around the crucible, a suction port for waste gas is provided around a recovery means provided on the upper part of a vacuum vessel, the stream of the inert gas is formed in the interval from the nozzle to the suction port, a material evaporated and diffused in the traverse direction or obliquely upward is rebounded by the stream of the inert gas to move toward the recovery means provided on the upper part of the vacuum vessel and the rate of recovery in the recovery means is controlled to exceed 80%.
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