| 摘要 |
PURPOSE:To improve the magnetic characteristics of the tilte medium such as the degree of orientation of the C axis of a Co-base alloy thin film and saturation magnetic flux density and the coercive force in the vertical direction by forming the Co-base alloy thin film consisting of a columnar crystal having appropriate grain diameter on a nonmagnetic substrate. CONSTITUTION:The first crystal grain-controlled film 4 consisting of Si, Ge, Sn or their alloys is provided on a Co amorphous magnetic thin film 5 of Co- Mo-Zr, Co-Mo-Nb, Co-W-Nb, Co-Nb-Zr, etc. The second crystal grain-controlled film 2 of hcp structure consisting of Ru, Sc, Y, Zn, etc., or an alloy contg. Ru, Sc, Y, Zn, Ti, etc., is formed on the film 4 and a Co-base alloy thin film is formed. Consequently, the Co-base alloy film consisting of columnar crystals having well-controlled and uniform grain diameter can be formed. The thicknesses of the first crystal grain-controlled film 4 and the second crystal grain-controlled film 2 are regulated to 100-3,000Angstrom and the thickness of the film consisting of columnar crystals having controlled grain diameter is controlled to 150-3,000Angstrom . Consequently, the degree of orientation of the C axis of the magnetic thin film is ameliorated and the magnetic characteristics are improved. |
