| 摘要 |
PURPOSE:To make it possible to treat a large number of substrates according to an optical vapor phase reaction method, by applying light energy to a substrate in parallel to the surface to be formed thereof from the outside of a reaction tube made of quartz. CONSTITUTION:Substrates 2 each having a surface to be formed are provided in a reaction tube 1 made of quarts arranged in a horizontal direction so as to have constant intervals therebetween and to stand close together in the direction vertical to the stream of reactive gases while a rod shaped or a spiral disc shaped light energy supply means 4 coaxial to the reaction tube arranged so as to encircle the reaction tube 1 is provided to the outside of the reaction tube 1. In addition, a heating apparatus 6 is provided to the outside of the means 4 and reactive gases are supplied from means 11, 7 while a reaction product and unnecessary reactive gases are further discharged from means 16, 12, 13. By this vapor phase reaction method, a large number of substrates can be treated. |
