| 摘要 |
PURPOSE:To suppress the production of a deflective product due to a manual handling and to improve the workability of a die bonder by automating a rearraying work of proper pellets and performing only an inspection of an external appearance by a worker. CONSTITUTION:An improper mark or an improper shape is detected on the basis of a signal of a television camera 7 to discriminate the proper or improper semiconductor pellet 2 on the first stage 5, thereby detecting the displacement of the positions of the proper pellet and a handling arm 9. The first stage 5 is driven by a stepping motor 14 to move in X- and Y-directions, to rotate it in a theta-direction, thereby positioning. The proper pellet is attracted by an attracting collet 10, fed to the second stage 11, and disposed on an arraying sheet 12. The second stage 11 is fed at the specified pitch by a stepping motor 13 in X- and Y- directions, and the proper pellets are arranged in a matrix. A worker can simultaneously check the external appearance of the surface of the pellet by a television monitor 8. |
