Brown stain suppressing phenol free and chlorinated hydrocarbon free photoresist stripper.

摘要

Stripping solution compositions which avoid the problem known as "brown staining" are provided. Relevant stripping solutions are those that are free from phenol and chlorinated hydrocarbon compounds and comprise a surfactant alkylarylsulfonic acid having 12-20 carbons, a hydrotropic aromatic sulfonic acid having 6-9 carbons and a halogen-free aromatic hydrocarbon solvent with a boiling point above 150°C. To suppress brown staining, a water soluble sulfone is incorporated into the stripping solution. The stripping compositions effectively remove organic polymeric substances from inorganic substrates and are substantially clear water rinsable.