| 摘要 |
PURPOSE:To prevent the generation of cracks by allowing the adjustment of the angle of a resonance mirror by the mechanical deformation of a diaphragm. CONSTITUTION:A terminal member 2 is sealed to a laser discharge tube 1, and the diaphragm 4 to the other end. A cylindrical mirror holding member 6 is sealed around the resonance mirror 7. Adjusting screws 3 are provided in the outer periphery of the member 6, and the tip of the screw 3 is screwed into the member 2 and fixed. The member 6 advances and retreats by adjusting the screws 3. Since the diaphragm 4 is easily deformed by outer force, the mirror 7 can be set at an arbitrary angle. |
