发明名称 PHASE CHANGE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A phase change memory device and a method for manufacturing the same are provided to increase the interval between PN diodes by arranging the PN diodes to be zigzag with an active region. A plurality of active areas(110) is extended in first direction while including a plurality of active regions. A switching element is arranged on the top of the plurality of active regions to be zigzag along a first direction. The lamination pattern of a phase change film and top electrode(134) is connected with a pair of switching elements which are adjacent with each other. The top electrode contact(150) is formed in order to connect to the top electrode, and the switching element is a vertical type PN diode(131).
申请公布号 KR20090090203(A) 申请公布日期 2009.08.25
申请号 KR20080015521 申请日期 2008.02.20
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHANG, HEON YONG
分类号 H01L21/8247 主分类号 H01L21/8247
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