| 摘要 |
PURPOSE:The titled crucible used in vapor deposition capable of evaporating various kinds of substances at a high temp. without being damaged by the reaction with evaporation substances, constituted by coating the outer surface of a crucible main body made of a material hardly reactive with the evaporation substances with a coating material made of a conductive material is obtd. CONSTITUTION:For example, a crucible main body 1 and a crucible lid 3 used in cluster ion beam vapor deposition are constituted of a material hardly reactive with a vapor deposition substance, e.g. ceramics such as zirconia or magnesia. The outer surfaces of the main body 1 and the lid 3 are coated with coating materials 2, 4 comprising graphite. By this method, the generation of charge-up is prevented even if the crucible is heated by electron bombardment and the reaction of the main body 1 and the lid 3 with an evaporation substance 5 even during a time when the temp. of the crucible rises to inject the evaporation substance from a nozzle 6. |
