| 摘要 |
PURPOSE:To stably form a hot spot on the axis of an electrode not depending on accuracy of forming a gas pole by providing concentrically a magnetic flux generating means within the one electrode of an electrode couple. CONSTITUTION:There is a cavity 4 at the center of an electrode 3 and a magnet 5 is buried in an electrode 2 and the line of magnetic force by the magnet 5 is coaxial with the axis of electrode and spreads symmetrically with respect to the axis. By installing such magnet 5, the charged particles move along the line of magnetic force of magnet 5 when discharge occurs. As a result, since the particles are concentrated to the center axis, the hot spot is formed on the center axis with excellent reproducibility and thereby a highly reliable apparatus can be obtained. |
