| 摘要 |
PURPOSE:To easily replace a crucible without damaging the same, by constituting a crucible main body from a plurality of detachable layers while forming the innermost layer thereof from a material hardly reacting with an evaporation substance. CONSTITUTION:A crucible used in an evaporation source is constituted of a crucible inner layer 1, a crucible outer layer 2, an inner layer lid 3 and an outer layer lid 4 and the inner layer 1 and the inner layer lid 3 are formed of a material hardly reacting with an evaporation substance 6 while the outer layer 2 and the outer layer lid 4 are formed of graphite and the inner layer 1 and the outer layer 2 are made detachable. By this structure, the damage of the inner layer 1 and the inner layer lid 3 is prevented and the replacement thereof becomes easy. |
