发明名称 半導体装置
摘要 To suppress deterioration in electrical characteristics in a transistor including an oxide semiconductor layer or a semiconductor device including the transistor. In a transistor in which a channel layer is formed using an oxide semiconductor, a silicon layer is provided in contact with a surface of the oxide semiconductor layer. Further, the silicon layer is provided in contact with at least a region of the oxide semiconductor layer, in which a channel is formed, and a source electrode layer and a drain electrode layer are provided in contact with regions of the oxide semiconductor layer, over which the silicon layer is not provided.
申请公布号 JP5961242(B2) 申请公布日期 2016.08.02
申请号 JP20140235401 申请日期 2014.11.20
申请人 株式会社半導体エネルギー研究所 发明人 坂田 淳一郎;郷戸 宏充;島津 貴志
分类号 H01L29/786;G09F9/30;H01L51/50;H05B33/14 主分类号 H01L29/786
代理机构 代理人
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