CERAMICS TARGET FOR SPUTTERING

摘要

PURPOSE:To form a membrane with good membrane quality in a mass production system by preventing the crack generation of a ceramics target, by relieving internal stress caused by the rising in temp. during sputtering by providing a large number of grooves to the upper surface of the ceramics target. CONSTITUTION:A large number of grooves 2 are provided to the surface side of a target 1 and a metallic cathode plate 3 is connected to the back surface side thereof while the target 1 is cooled through the cathode plate 3. It is unnecessary that the grooves 2 reach the cathode plate 3 and it is desirable that the width of each groove 2 is made narrower. The surface temp. of the target 1 rises during sputtering but distributed as shown by the broken line 5 and internal stress generated by thermal expansion is relieved by providing the grooves 2 and no crack is generated.