| 摘要 |
PURPOSE:To improve the operation speed without a damage or chipping by standing wafers on a wafer receiver made of synthetic resin at first and then lowering the receiver to stand them on a crystal boat by the soft landing instead of standing the wafers on a crystal boat from beginning. CONSTITUTION:A wafer receiver 10 is arranged higher than a level of a crystal boat 2. A semiconductor wafer 1 is attracted and held by the operation of a free arm 8 and a vacuum chuck 9 to be transported to a wafer receiver 10. Subsequently, the free arm 8 is extended to insert the semiconductor wafer 1 in a groove 11, after which the attraction is released and the semiconductor wafer 1 is stood on the wafer receiver 10. By repeating these operations, the semiconductor wafers 1 are stood in all grooves 11... of the wafer receiver 10. Next, when the wafer receiver 10 is lowered gradually with passing through between crystal bars 3 and 3, the soft landing into grooves 5 and 5 arranged on the crystal bars 3 and 3 can be performed, thereby the transfer to the crystal boat 2 is completed. |
