| 摘要 |
PURPOSE:To enhance an inspection passing yield by furnishing automatic dust detection judgement function and automatic housing function in a protective case, and preventing dust from attaching during manual inspection. CONSTITUTION:An exposure mask 6 is automatically conveyed from an exposure mask protective case 4 through an automatic dust detection station 3 to a mask washing station 2 with a conveyor, and subjected to various kinds of washing treatments, and then, it is again returned to the washing station 2. At that time, its front and reverse sides are scanned with a laser scan type dust detection mechanism composed of two pairs of laser heads 7 and photodetectors 8 to quantitatively detect the size and amt. of dust remaining on the mask 6 by detecting the diffused light. The result is produced from a defect detection data output station 5 and compared with the predetermined test passing standard. When the mask 6 does not pass the test, the washing and the defect detection are repeated, and when it passes the test in a predetermined limit times, the mask 6 is automatically housed in an exposure mask protective case 4, thus completing the washing treatment. |
