| 摘要 |
PURPOSE:To carry out washing of a scrubbing brush itself easily and effectively in a short time by generating ultrasonic waves in a washing soln. same as that used for washing a photomask, filled in a washing vessel having the brush before washing the photomask. CONSTITUTION:When a washing vessel 4 is filled with a washing soln. from a shower supply pipe 2 to immerse a scrubbing brush 1 in the washing soln. an ultrasonic wave oscillator 8 is actuated. The soln. is continuously supplied but the soln. does not increase up to a liquid level 7 due to an overflow drain pipe 6 kept open, and dust lower in specific gravity than the soln. flows out through the pipe 6. After the lapse of a prescribed time, feed of the soln. through the pipe 2 is stopped, and a drain valve 3 is opened to drain dust higher in specific gravity than the soln. Said processes are carried out in 2-3 times. After the completion of washing of the brush, a photomask is inserted between the two brushes and scrubbed by rotating the brushes to wash the photomask. |
