| 摘要 |
PURPOSE:To perfectly remove attached matters of >=3mum size and to prevent stains, etc. during drying of a washing soln. by wetting a photomask with an electrolytic soln., showing it with an alcohol type org. solvent, cleaning it with fluorinated hydrocarbon vapor, and drying it. CONSTITUTION:In an electrolytic soln. vessel 100, a photomask 10 is washed with aq. ammonia 2 filtered with a filter 16 and having prescribed purity, and thereafter, the use of the aq. ammonia 2 prevents electrification of the photomask 10, and attachment of dust, etc. perfectly in the following steps. In a shower vessel 200, isopropanol 9 is sprayed on the photomask 10 to substitute isopropanol 9 for the aq. ammonia 2 and to help the next drying step. In a vapor vessel 300, the photomask 10 is dried perfectly in a short time by once immersing it in trichlorotrifluoroethane 13 vapor and taking it out. |
