| 摘要 |
PURPOSE:To prevent the exfoliation of the lower electrodes and thus restrain the deterioration of electric characteristics with time by a method wherein said electrode formed on a substrate is composed of a double layer thin film. CONSTITUTION:A polymer resin thin film 2 having thermal resistance is formed on e.g. a stainless substrate 1 having flexibility and thermal resistance. The lower electrodes 3a-3e of the double layer structure consisting of the first layer of a Cr film and the second one of a stainless film are formed, respectively, by sputtering Cr on this substrate 1 and stainless further thereon. Here, a Cr film of approx. 500Angstrom is formed as a thick film difficult to produce cracks and having large adhesion property, and stainless is laminated on the Cr film, thereby enabling to manufacture the element excellent both in reliability and electric characteristics. Next, an amorphous film 6 is formed on the resin thin film whereon these electrodes 3a-3e are formed, and further the photo transmitting upper electrodes 5a-5e are adhesion-formed on the film 4 opposed to the electrodes 3a-3e. |
