MAGNETIC ARRANGEMENT ON CATHODE TARGET IN CATHODE SPUTTER APPARATUS,申请号GB19810029373-传众专利搜索

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发明名称	MAGNETIC ARRANGEMENT ON CATHODE TARGET IN CATHODE SPUTTER APPARATUS
摘要
申请公布号	GB2090872(B)	申请公布日期	1984.10.31
申请号	GB19810029373	申请日期	1981.09.29
申请人	BALZERS AG	发明人
分类号	C23C14/36;C23C14/35;H01J37/34;(IPC1-7):C23C15/00	主分类号	C23C14/36
代理机构		代理人
主权项
地址

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