반도체 웨이퍼의 에피택셜 생장장치,申请号KR19830001556-传众专利搜索

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发明名称	반도체 웨이퍼의 에피택셜 생장장치
摘要	내용 없음
申请公布号	KR840004824(A)	申请公布日期	1984.10.24
申请号	KR19830001556	申请日期	1983.04.14
申请人	null, null	发明人	고미야마 요시조오(외 2)
分类号	H01L21/205;C30B25/10	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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