Method for the preparation of regenerable dielectric layers through polymerization of gases

摘要

In the preparation of regenerable dielectric layers through polymerization of gases by means of a glow discharge, a siloxane or a silazane or a mixture of siloxanes and/or silazanes is blown into the region of the glow discharge in addition to monomeric perfluoro-hydrocarbons with the empirical formula (CF2)n and/or the corresponding perfluorized cyclic alkanes.