| 摘要 |
PURPOSE:To improve the use efficiency of targets by forming one magnetic pole into an annular shape and providing the other magnetic pole in the central part thereof and providing a target of approximately an annular shape in front of one magnetic pole and a target of approximately a plate shape in front of the other. CONSTITUTION:A titled device consisting of a pair of magnetic poles formed of one magnetic pole 8a of an annular shape on the outer side and the other magnetic pole 8b in the central part thereof, a target 5a of approximately an annular shape facing the direction of substrates 6 in front of the pole 8a, a target 5b of approximately a plate shape likewise facing the direction of the substrates 6 in front of the pole 8b, and a vacuum treating chamber 1. Cathode potential is applied to said targets 5a, 5b to generate plasma of high density, and to develop erosion areas 10 over the entire surface between a pair of the poles 8a and 8b. In this way, the use efficiency of the targets 5a, 5b is improved. |
