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发明名称
포지티브형(positive type) 감광성 내식막 조성물
摘要
<p>내용 없음</p>
申请公布号
KR840004589(A)
申请公布日期
1984.10.22
申请号
KR19830002297
申请日期
1983.05.25
申请人
null, null
发明人
하나바따 마꼬또 (외 3)
分类号
G03F7/022;G03F7/023;G03F7/032;H01L21/027
主分类号
G03F7/022
代理机构
代理人
主权项
地址
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