| 摘要 |
PURPOSE:To improve the operational efficiency of a goniometer stage for an electron ray apparatus by preventing any unfavorable movement of a sample during the operation of moving the sample by rotating each driving shaft of a mobile mechanism mounted on a slanting table interlockingly with the rotational operation of the slanting table by the same angle as the ratation of the slanting table. CONSTITUTION:In a goniometer stage 70, and X mobile table 7 is installed on an orbit member 6 (installed on the base plate of a sample chamber 2) in such a manner as to be movable in X direction: a Z mobile table 8 is placed on the X mobile table 7; a slanting table 9 for giving a slant to a sample 5 is placed on the Z mobile table 8; a Y mobile table 10 is placed on the slanting table 9 in such a manner as to be movable in Y direction; and a rotary table 11 for giving to the sample 5 a rotation of an axis vertical to the surface of the sample 5 is placed on the Y mobile table 10. When a slant-producing knob 39 is rotated, the slanting table 9 rotates according to the rotation of the knob 39. At the same time, bevel gears 106 and 107, a worm 104 and a worm gear 103 rotate causing a shaft 100 to rotate by the same angle as the above slanting table 9. As a result, the operation of the slanting table 9 does not interfere with either the movement nor the rotation in Y direction and any positional shift of the sample 5 on a sample table 4 is not caused. |
