摘要 |
<p>A thermal mass flow-meter used in particular for corrosive and hot gases. It includes a flow duct having at least two measuring resistors. At least one of these is arranged in the flow cross-section. At least one heat source is provided in the zone of influence of the measuring resistors; heat source and measuring resistance may be identical. For the purpose of obtaining long-term resistance to corrosion accompanied by great sensitivity as regards response, the measuring resistors consist of a thin-film resistor with a ceramic insulating member, a measuring resistor is connected to a ceramic support member by way of glass solder, and the support member is in turn connected to the flow duct by way of a glass solder element.</p> |