摘要 |
A magnetic recording member characterized in that it comprises a substrate having formed on a surface thereof, either directly on the surface or on the intermediary of a soft magnetic material coating layer, a substantially perpendicular-incidence magnetic film comprising a composition of a magnetic metal and oxygen (Me-O), where the magnetic metal Me comprises one or more ferro-magnetic metals and/or magnetic alloys thereof. In a method of manufacturing such a magnetic recording member, while oxygen gas is introduced into a vacuum treatment chamber (1) a magnetic metal Me (b) is vaporized and vapors thereof are deposited on a surface of a substrate (a) at substantially perpendicular incidence to the surface thereof, while part of the metal is oxidized, so that there is formed on the surface of the substrate (a) a substantially perpendicular-incidence magnetic film provided by a composition of
(FexCoyNiz)1-m0m where, substantially, 0</=X</= 0.05, 0</= z</=0.40, x+y+z = 1, and 0.15</=m</=0.50.
<??>The substrate (a) passes under a rotary cooling can (2) from a roller (4) to a roller (5). The metal (b) is placed in an electron beam evaporation source (3) where an electron beam heating means (9) acts on it. The oxigen is fed through a pipe (6) and vapor-adhesion shield plates (7) define a space(8) therebetween to enable the substrate (a) to be coated through the space (8).
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