Apparatus and method for neutralizing static electric charges in sensitive manufacturing areas

摘要

An apparatus and method for neutralizing static electric charges are disclosed, which include a cooperating pair of laterally spaced apart electrodes disposed so as to be in a flow path of a moving airstream. A relatively high positive DC voltage is applied to one electrode, and a relatively high negative DC voltage is applied to the other electrode. As a result, the electrodes generates free positive and negative ions, which are carried away by the airstream and delivered directly to the manufacturing area, where they are attracted to opposite static charges. Thus the ions act to neutralize static charges of either polarity, and the excess ions will eventually be attracted to each other or to ground, leaving no static in the area. In a preferred embodiment, the electrodes are mounted immediately downstream of a HEPA filter bank which removes essentially all particulate matter and dust before the ions are generated in the airstream.