CLEAN ROOM FOR MANUFACTURE OF SEMICONDUCTOR DEVICE

摘要

PURPOSE:To increase the cleanness by a method wherein a transporting track to connect the stations of each floor mutually is laid under the board of the floor and delivery and reception of the semiconductor containers between the stations and the transporting track are performed through an opening for carry-in and -out opened on the floor board. CONSTITUTION:A transporting track 4 laid under a floor board 18 of the floor is preferably covered with a duct cover 14 and extends upward under stations 3. The floor board 18 is provided with holes opened enough to pass the duct cover 14 through and the duct cover 14 and the transporting track 4 project from the floor board 18. The semiconductor container transported by a transporting car 5 is carried in or out at the station 3 on the floor board 18.