发明名称 LITHOGRAPHIC PROCESS
摘要 Process is claimed during which the article being fabricated has a glassy layer in contact with a source metal material. Regions of the article are irradiated with radiation from the source, modulated to produce regions demarcated by light/dark interfaces, so that metal migrates into the grassy layer with differing ease of removal, and selective areas of the layer are removed using a developing agent.
申请公布号 KR840001590(B1) 申请公布日期 1984.10.11
申请号 KR19810001989 申请日期 1981.06.03
申请人 WESTERN ELECTRIC CO., 发明人 TAI KING LIEN
分类号 H01L21/027;G03F7/004;(IPC1-7):B41M5/00 主分类号 H01L21/027
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