| 摘要 |
PURPOSE:To prevent a protective film from cracking and obtain a thermal head of long life by a construction wherein the protective film in the form of an oxidation resistant layer made of at least silicon oxinitride is coated on a heating resistor provided on an insulating substrate. CONSTITUTION:After sputtering a Ta-N resistor film 11 on a glazed alumina substrate 10, NiCr 13a of 500Angstrom , Au 13b of 5,000Angstrom , and Cr 13c of 500Angstrom are vapor-deposited in this order. Then, patterning is made with a photolithography method to form a conductor section 13 and a heating resistor section 12. Next, the target made of silicon oxinitride, which is formed by mixing silicon nitride powder of 70wt% with silicon oxide powder of 30wt% and sintering the mixture, is sputtered on the heating resistor section 12 in thickness of 1mum to form an oxidation resistant layer 14. Thereafter, Ta2O5 is sputtered 3mum thick to form a wear resistant layer 15, thereby forming a thermal head. |
