| 摘要 |
PURPOSE:To increase considerably the kinds of depositable metals by dropping a soln. contg. an organometallic compound on only a pescribed part of a substrate in an atmosphere of a gas inert to the organometallic compound and by irradiating laser light on the dropped soln. through the substrate. CONSTITUTION:A soln. contg. an organometallic compound in a soln. resrervoir 1 is dropped 5 on only a prescribed part of a substrate with a dropping mechanism 2 under instructions from a controller 3. At the same time, a gas inert to the organometallic compound is fed to the periphery of the prescribed part from an inert gas feeding system 8. Laser light is then irradiated on the dropped soln. 5 from a laser device 7 through a convergent optical system 6 and the substrate 4 under instructions from the controller 3 to deposit the metal in the compound. |
