| 摘要 |
PURPOSE:To detect exactly a peak intensity of a target element by detecting a moving extent of a sweep axial direction of a target spectrum peak based on charge-up of a sample, obtained by scanning the sample by an electron beam, and generating a sweep signal which has corrected movement. CONSTITUTION:An electron beam 3 converged through a converging lens 2 is irradiated to a sample 1, and a generated auger electron 5 passes through an energy analyzer 6 and is detected by a detector 8. A detecting signal is recorded in a recording meter 11 through a phase detector 10. On the other hand, an output signal of the detector 10 is inputted to a control device 13 through an A/D converter 12, and a control part 13a controls a sweep signal generator 7, and also controls a storage part 13b, a peak position detecting part 13c and a correcting signal generating part 13d. A correcting signal from the correcting signal generating part 13d is applied to the analyzer 6 through a D/A converter 14 and an adding circuit 16 after a correction of a peak shift by charge-up of the sample is added to a sweep signal from the sweep signal generator 7, and an exact intensity of a target element is recorded 11. |
