| 摘要 |
PURPOSE:To obtain a sensor capable of measuring temp. and humidity simultaneously in low cost and in simple construction and easily decreasing the size, by constituting the titled sensor in which the temp. sensible range is isolated from the outer air and sealed and the humidity sensible range can be brought into contact with the outer air by using the same material capable of sensing the temp. and humidity. CONSTITUTION:An aqueous solution in which ammonium polystyrene sulfonate as a high-polymer electrolyte and polyvinyl alcohol are mixed in the ratio of 1 to 0.25 is coated on a ceramic substrate 2 forming previously a comb-teeth shape electrode, heated and dried to form the pattern range 5 for humidity sensible element and the pattern range 6 for temp. sensible element. An element input common pad 7 and taking out pads 8, 9 are introduced out from the boundary part of both ranges 5, 6, and each other end of the boundary part of each range 5, 6 respectively. The surfaces of the ranges 5, 6 are covered with silicone resin protecting film 4, the range 6 is made airtight by a hermetic seal 13, etc., and constituted so that a stainless net 15 is provided at the part corresponding to the range 5 of a package 10 and a range 11 which is in contact with the outer air is separated from a range 12 which is out of contact with the outer air. Thereby the element capable of measuring temp. and humidity simultaneously can be obtained. |
