| 摘要 |
PURPOSE:To enable to impress a high voltage of quick rise and rectangular wave pulses of large current for a relatively long time by providing a pulse generating circuit equipped with a cylindrical dielectric ceramic wherein electrodes are adhered and formed on the inner and outer peripheries respectively. CONSTITUTION:The pulse shaping circuit PFL has a structure wherein an inner peripheral electrode 2 and an outer peripheral electrode 3 are formed on the inner and outer peripheral surfaces of the cylindrical ceramic 1 respectively. This PFL is operated with the clearance between the electrode 2 and 3 at one end (a) in the axial direction as the pulse input end and that at the other end (b) as the pulse output end. After charging a capacitor C by supplying a high voltage through an input resistor R, a sparking gap SG1 is closed, thus charging the PFL. When the charged voltage of the PFL becomes at a fixed value, resulting in the closure of a rail gap SG2, the rectangular wave pulses are impressed on a rare gas-halide excimer laser tube A, and accordingly the excimer laser at an ultraviolet ray region generates. Thereby, the excitation of said laser can be securely performed, and the miniaturization is facilitated. |
