发明名称 FERROMAGNETIC THIN FILM FORMING APPARATUS
摘要 PURPOSE:To complete an apparatus having compact structure which is capable of quickly and accurately correcting thermal deformation such as curls, etc. by inserting a web heating means between a cooling drum and web take-up part of web running system. CONSTITUTION:A web W supplied from a web roll WR1 of the web sending part 34 is cooled from the rear surface by a cooling drum 36 and is heated by the flow of steam V consisting of vaporized particles of ferromagnetic material 38 within a hearth 39 heated and vaporized from the surface by the electron beam EB of electron gun 41. Thereby, a little amount of thermal deformation is generated by difference of thermal expansion coefficients of both sides. A heat roller 42 is disposed between the cooling drum 36 and the web take-up part 37, thereby the web W is heated from the rear side up to a temperature near the glass transition point in order to correct and eliminate thermal deformation and it is then wound like a coil by the web take-up part 37.
申请公布号 JPS59165410(A) 申请公布日期 1984.09.18
申请号 JP19830039398 申请日期 1983.03.10
申请人 FUJI SHASHIN FILM KK 发明人 YANAI AKIO;SHIRAHATA RIYUUJI;SEKINE MASARU
分类号 C23C14/56;G11B5/85;H01F41/20 主分类号 C23C14/56
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