发明名称 CARRIER APPARATUS FOR CLEAN ROOM
摘要 PURPOSE:To carry materials and samples, etc. without contaminating working environment by controlling running of carrier and open or close of shutter in accordance with an output of a carrier running condition detecting means. CONSTITUTION:Upon completion of cultivating ground preparation work for cultivating chamber 8 to be used for cultivating mashroom in the preparatory chamber 1, a carrier 7 is driven by a linear motor 9 and carried to a sterilization chamber 2. The running condition of carrier 7 is detected by a running condition detecting means 10, the CPU compares a measured running data with the reference running data. When the running condition reaches the specified value, the CPU issues an instruction for opening a shutter 5 provided at the boundary between the preparatory chamber 1 and the sterilization chamber 2. When the carrier 7 perfectly enters the sterilization chamber 2, the shutter 5 is closed. When sterilization work completes perfectly, the carrier 7 is driven again and it enters a germ-free chamber 3 wherein some processes such as implantation of germ seed to the cultivating ground in the cultivating reservoir 8 are carried out.
申请公布号 JPS59165413(A) 申请公布日期 1984.09.18
申请号 JP19830040262 申请日期 1983.03.10
申请人 HITACHI KIDEN KOGYO KK 发明人 IMAMURA YOSHINOBU;KAMEI SHIGEKI;SEKIHARA KIYOUICHI
分类号 H01L21/677;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/677
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