| 摘要 |
PURPOSE:To eliminate compliance difference, by a method wherein atmospheric air is sealed in a liquid communicating path while constant pressure is acted on both pressure receiving elements to measure the differential pressure in the liquid communicating path and a sealing liquid is sealed in said path in such a state that two pressure corresponding to said differential pressure are acted on the pressure receiving elements. CONSTITUTION:Atmospheric air is sealed in a liquid communicating path 1 while static pressure Ps is acted on both diaphragms 4a, 4b and the differential pressure of the high pressure side and the low pressure side of the liquid communicating path 1 is measured by a differential pressure sensor 15. Subsequently, a sealing liquid sealed in the liquid communicating path 1 within a vacuum sealing chamber 17 in an overflowing state and, thereafter, said path 1 is taken out from the sealing chamber 17 while sealing amount control apparatuses 22 are attached to the high pressure side and the low pressure side. By these sealing amount control apparatuses 22, the sealing liquid is sealed in the liquid communicating path 1 in such a state that two pressures set corresponding to the measured differential pressure are acted on the diaphragms 4a, 4b. Therefore, the diaphragms 4a, 4b are elastically deformed so as to control volume difference to make it possible to eliminate compliance difference. |
