| 摘要 |
PURPOSE:To aim at miniaturization of an equipment and reduction of the inductance of a transmitting line by using transmitting conductive plates of a plate shape in a power transmission line and by forming discharge electrodes for plasma generation at one part of the transmitting conductive plates. CONSTITUTION:After charging a condenser 2 by a power supply 1, an X-ray mask 14 and a wafer 15 are adjusted in positions by a position adjusting equipment 18 so that X-rays may be radiated on an exposure range of the wafer 15 and a pattern may be transferred on a predetermined location, a high voltage is applied between an electrode 11 and an electrode 12 by operating a switch 3, forming plasma 16 by discharging, and X-rays 17 emitted from the plasma 16 are radiated to the wafer 15 through a take out window 13 of X-rays and an X-ray mask 14 so as to complete an exposure. A condenser 2, a switch 3, a power transmission line 9, a discharging electrode 11 and 12 can be mechanically integrated in one body by using transmitting conductive plates 6 and 7 of a plate shape, and easily miniaturized. |
